Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli (Redaktør) Mervi Paulasto-Kröckel (Redaktør) Matthias Petzold (Redaktør) Horst Theuss (Redaktør) Teruaki Motooka (Redaktør) Veikko Lindroos (Redaktør)
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. Les mer
The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.
Detaljer
- Forlag
- Elsevier Science Publishing Co Inc
- Innbinding
- Paperback
- Språk
- Engelsk
- ISBN
- 9780128177860
- Utgave
- 3. utg.
- Utgivelsesår
- 2020
- Format
- 28 x 22 cm