This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast
formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models
and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get
acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume.
The expert reader will find a complete reference of the technique covering all important applications in several chapters
written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication,
applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular
HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the
historical developments leading to the existing tool complements the content.