Surface Metrology for Micro- and Nanofabrication
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. Les mer
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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
Detaljer
- Forlag
- Elsevier Science Publishing Co Inc
- Innbinding
- Paperback
- Språk
- Engelsk
- ISBN
- 9780128178508
- Utgivelsesår
- 2020
- Format
- 23 x 19 cm
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